Organosilicate polymer e-beam resists with high resolution,...

Organosilicate polymer e-beam resists with high resolution, sensitivity and stability

Lee, Sung-Il, Sim, Jae Hwan, Lee, Hae-Jeong, Kasica, Richard, Kim, Hyun-Mi, Soles, Christopher L., Kim, Ki-Bum, Yoon, Do Y.
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Volume:
27
Language:
english
Journal:
Applied Organometallic Chemistry
DOI:
10.1002/aoc.2985
Date:
November, 2013
File:
PDF, 337 KB
english, 2013
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