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Next generation Nb superconductor integrated circuit process
Abelson, L.A., Elmadjian, R.N., Kerber, G.L.Volume:
9
Language:
english
Journal:
IEEE Transactions on Appiled Superconductivity
DOI:
10.1109/77.783716
Date:
June, 1999
File:
PDF, 406 KB
english, 1999