Highly conformal film growth by chemical vapor deposition....

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2009 Vol. 27; Iss. 5

Highly conformal film growth by chemical vapor deposition. II. Conformality enhancement through growth inhibition

Yanguas-Gil, A., Kumar, N., Yang, Y., Abelson, J. R.
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.3207746
File:
PDF, 536 KB
english, 2009
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