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Stress and microstructure evolution in thick sputtered films
Andrew J. Detor, Andrea M. Hodge, Eric Chason, Yinmin Wang, Hongwei Xu, Mark Conyers, Abbas Nikroo, Alex HamzaVolume:
57
Year:
2009
Language:
english
Pages:
11
DOI:
10.1016/j.actamat.2008.12.042
File:
PDF, 803 KB
english, 2009