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State feedback control for adjusting the dynamic behavior of a piezoactuated bimorph atomic force microscopy probe
Orun, Bilal, Necipoglu, Serkan, Basdogan, Cagatay, Guvenc, LeventVolume:
80
Year:
2009
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3142484
File:
PDF, 1.17 MB
english, 2009