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[IEEE 2009 IEEE Sensors - Christchurch, New Zealand (2009.10.25-2009.10.28)] 2009 IEEE Sensors - Thermally actuated MEMS resonant sensors for mass measurement of micro/nanoscale aerosol particles
Hajjam, Arash, Rahafrooz, Amir, Wilson, James C., Pourkamali, SiavashYear:
2009
Language:
english
DOI:
10.1109/icsens.2009.5398557
File:
PDF, 944 KB
english, 2009