Strontium niobate high-k dielectrics: Film deposition and material properties
A. Hardy, S. Van Elshocht, C. Adelmann, J.A. Kittl, S. De Gendt, M. Heyns, J. D’Haen, M. D’Olieslaeger, M.K. Van Bael, H. Van den Rul, J. MullensVolume:
58
Year:
2010
Language:
english
Pages:
10
DOI:
10.1016/j.actamat.2009.09.006
File:
PDF, 2.44 MB
english, 2010