Effect of sputtering with hydrogen dilution on fluorine...

Effect of sputtering with hydrogen dilution on fluorine concentration of low hydrogen content fluorinated amorphous carbon thin films with low dielectric constant

Yokomichi, Haruo, Masuda, Atsushi
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371078
File:
PDF, 302 KB
english, 1999
Conversion to is in progress
Conversion to is failed