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Effect of sputtering with hydrogen dilution on fluorine concentration of low hydrogen content fluorinated amorphous carbon thin films with low dielectric constant
Yokomichi, Haruo, Masuda, AtsushiVolume:
86
Year:
1999
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.371078
File:
PDF, 302 KB
english, 1999