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[IEEE Multi-Physics Simulation and Experiments in Microelectronics and Microsystems (EuroSimE) - Linz, Austria (2011.04.18-2011.04.20)] 2011 12th Intl. Conf. on Thermal, Mechanical & Multi-Physics Simulation and Experiments in Microelectronics and Microsystems - FEM based modeling and optimization of a 2D micro mirror
Schock, Wolfram, Mehner, Jan, Fritz, Joachim, Muchow, Jorg, Friese, Christoph, Pinter, StefanYear:
2011
Language:
english
DOI:
10.1109/esime.2011.5765782
File:
PDF, 1.71 MB
english, 2011