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Improving the Morphological and Optical Properties of Sputtered Indium Tin Oxide Thin Films by Adopting Ultralow-Pressure Sputtering
Huh, Myung Soo, Yang, Bong Seop, Song, Jaewon, Heo, Jaeyeong, Won, Seok-Jun, Jeong, Jae Kyeong, Hwang, Cheol Seong, Kim, Hyeong JoonVolume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3005562
File:
PDF, 392 KB
english, 2009