Hafnium silicide formation on Si(100) upon annealing

Physical Review B 2006 / 8 Vol. 74; Iss. 7

Hafnium silicide formation on Si(100) upon annealing

de Siervo, A., Flüchter, C. R., Weier, D., Schürmann, M., Dreiner, S., Westphal, C., Carazzolle, M. F., Pancotti, A., Landers, R., Kleiman, G. G.
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Volume:
74
Language:
english
Journal:
Physical Review B
DOI:
10.1103/PhysRevB.74.075319
Date:
August, 2006
File:
PDF, 1.00 MB
english, 2006
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