Oxidation of TiN in an oxygen plasma asher

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1994 / 7 Vol. 12; Iss. 4

Oxidation of TiN in an oxygen plasma asher

Tompkins, Harland G.
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Volume:
12
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.579191
Date:
July, 1994
File:
PDF, 662 KB
english, 1994
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