Miniaturized vacuum gauges

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2004 Vol. 22; Iss. 2

Miniaturized vacuum gauges

Wilfert, St., Edelmann, Chr.
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Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1642649
File:
PDF, 1015 KB
english, 2004
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