[IEEE 2008 9th International Conference on Solid-State and Integrated-Circuit Technology (ICSICT) - Beijing, China (2008.10.20-2008.10.23)] 2008 9th International Conference on Solid-State and Integrated-Circuit Technology - PMOS ring oscillating digital pressure sensor manufactured by MEMS proces
Yang, James Y., Zhiping Yu,, Litian Liu,Year:
2008
Language:
english
DOI:
10.1109/icsict.2008.4735064
File:
PDF, 780 KB
english, 2008