Fourier transform infrared studies of polyimide and poly(methyl-methacrylate) surfaces during downstream microwave plasma etching
Leu, JihperngVolume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.577156
Date:
November, 1991
File:
PDF, 1.23 MB
english, 1991