[IEEE ICVC'99. 6th International Conference on VLSI and CAD...

[IEEE ICVC'99. 6th International Conference on VLSI and CAD - Seoul, South Korea (26-27 Oct. 1999)] ICVC '99. 6th International Conference on VLSI and CAD (Cat. No.99EX361) - Optimum barrier layer for Al-PMD (preferential metal deposition) process

Byung Hee Kim,, Jong Myeong Lee,, Yun Sook Chae,, Sang Bom Kang,, Gil Heyun Choi,, Young Wook Park,, Sang In Lee,

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Year:

1999

Language:

english

DOI:

10.1109/icvc.1999.820884

File:

PDF, 227 KB

english, 1999

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