Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
Quantitative depth profiling of ultrathin high-k stacks with full spectrum time of flight–secondary ion mass spectrometry
Py, Matthieu, Barnes, Jean-Paul, Boujamaa, Rachid, Gros-Jean, Michael, Nakajima, Kaoru, Kimura, Kenji, Roukoss, Charbel, Pelissier, Bernard, Gambacorti, NarcisoVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3589806
File:
PDF, 925 KB
english, 2011