Intrinsic stress evolution in laser deposited thin films
Scharf, Thorsten, Faupel, Jörg, Sturm, Kai, Krebs, Hans-UlrichVolume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1602565
File:
PDF, 517 KB
english, 2003