Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures
2004 Vol. 22; Iss. 1
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Compositional effects on electrical and mechanical properties in carbon-doped oxide dielectric films: Application of Fourier-transform infrared spectroscopy
Andideh, Ebrahim, Lerner, Michael, Palmrose, Gerald, El-Mansy, Safaa, Scherban, Tracey, Xu, Guanghai, Blaine, JeanetteVolume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.1640401
File:
PDF, 490 KB
english, 2004