[IEEE 2013 Seventh International Conference on Sensing Technology (ICST) - Wellington, New Zealand (2013.12.3-2013.12.5)] 2013 Seventh International Conference on Sensing Technology (ICST) - Coordinate measurement on wafer level — From single sensors to sensor arrays
Krah, T., Wedmann, A., Kniel, K., Hartig, F., Ferreira, N., Buttgenbach, S.Year:
2013
Language:
english
DOI:
10.1109/icsenst.2013.6727726
File:
PDF, 808 KB
english, 2013