[IEEE 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - San Francisco, CA, USA (2014.01.26-2014.01.30)] 2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS) - A polymer mems mirror for on-demand light distribution fabricated by injection molding and transfer of printed layers
Kurihara, Kazuma, Nagumo, Osamu, Takagi, Hideki, Maeda, RyutaroYear:
2014
Language:
english
DOI:
10.1109/memsys.2014.6765702
File:
PDF, 3.75 MB
english, 2014