Low-damage milling of an amino acid thin film with cluster ion beam
Hada, Masaki, Ibuki, Sachi, Hontani, Yusaku, Yamamoto, Yasuyuki, Ichiki, Kazuya, Ninomiya, Satoshi, Seki, Toshio, Aoki, Takaaki, Matsuo, JiroVolume:
110
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3658220
File:
PDF, 1.14 MB
english, 2011