![](/img/cover-not-exists.png)
Summary Abstract: A hollow cathode for ion beam processing plasma sources
Aston, GraemeVolume:
1
Year:
1983
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.572108
File:
PDF, 364 KB
english, 1983