Bonding of silicon wafers for silicon-on-insulator
Maszara, W. P., Goetz, G., Caviglia, A., McKitterick, J. B.Volume:
64
Year:
1988
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.342443
File:
PDF, 1.22 MB
english, 1988