Microelectromechanical displacement sensing using...

Applied Physics Letters 2003 Vol. 82; Iss. 3

Microelectromechanical displacement sensing using InAs/AlGaSb heterostructures

Yamaguchi, Hiroshi, Miyashita, Sen, Hirayama, Yoshiro
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Volume:
82
Year:
2003
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.1537047
File:
PDF, 453 KB
english, 2003
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