New very high frequency plasma source using a TM[sub...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2000 Vol. 18; Iss. 6

New very high frequency plasma source using a TM[sub 01]-mode patch antenna with short pins

Okumura, Tomohiro, Matsui, Takuya, Suzuki, Hideo, Sakiyama, Kazuyuki
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Volume:
18
Year:
2000
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1310654
File:
PDF, 803 KB
english, 2000
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