Auger electron spectroscopy depth profiling of Ge/Si...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 1998 / 5 Vol. 16; Iss. 3

Auger electron spectroscopy depth profiling of Ge/Si multilayers using He[sup +] and Ar[sup +] ions

Menyhard, M.
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Volume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581238
Date:
May, 1998
File:
PDF, 332 KB
english, 1998
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