[IEEE 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits (IPFA) - Suzhou, Jiangsu, China (2009.07.6-2009.07.10)] 2009 16th IEEE International Symposium on the Physical and Failure Analysis of Integrated Circuits - Characteristics of a Local Oxidation of silicon multi-tie body polysilicon thin-film transistor
Hsien-Nan Chiu,, Jyi-Tsong Lin,, Yi-Chuen Eng,, Po-Hiesh Lin,, Tzu-Feng Chang,, Chih-Hung Sun,, Hsuan-Hsu Chen,, Chih-Hao Kuo,Year:
2009
Language:
english
DOI:
10.1109/ipfa.2009.5232692
File:
PDF, 8.74 MB
english, 2009