Measurements of spatial distribution of a primary electron and its effects on the performance of a magnetic multicusp ion source
Ueda, Yoshio, Doi, Makoto, Nishikawa, Masahiro, Goto, SeiichiVolume:
62
Year:
1991
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1142316
File:
PDF, 859 KB
english, 1991