Chemical stability of Si[sup n+] species in SiO[sub x] (x

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2001 Vol. 19; Iss. 1

Chemical stability of Si[sup n+] species in SiO[sub x] (x

Barranco, A., Mejı́as, J. A., Espinós, J. P., Caballero, A., González-Elipe, A. R., Yubero, F.
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Volume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1323972
File:
PDF, 495 KB
english, 2001
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