High performance thin film transistor with low temperature atomic layer deposition nitrogen-doped ZnO
Lim, S. J., Kwon, Soon-ju, Kim, Hyungjun, Park, Jin-SeongVolume:
91
Year:
2007
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.2803219
File:
PDF, 342 KB
english, 2007