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Ultralarge scale integrated metallization and interconnects
Whitman, Christine, Moslehi, Mehrdad M., Paranjpe, Ajit, Velo, Lino, Omstead, TomVolume:
17
Year:
1999
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581700
File:
PDF, 1.13 MB
english, 1999