Hysteresis reduction by fluorine incorporation into high...

Applied Physics Letters 2014 / 01 Vol. 104; Iss. 3

Hysteresis reduction by fluorine incorporation into high permittivity tetragonal ZrO2 on Ge

Chang, Hung-Chih, Lin, Cheng-Ming, Huang, Chih-Hsiung, Liu, C. W.
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Volume:
104
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.4862481
Date:
January, 2014
File:
PDF, 1.22 MB
english, 2014
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