[IEEE 2013 Transducers & Eurosensors XXVII: The 17th...

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[IEEE 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Barcelona, Spain (2013.06.16-2013.06.20)] 2013 Transducers & Eurosensors XXVII: The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS & EUROSENSORS XXVII) - Atomic layer deposited Al2O3 and parylene C dual-layer encapsulation for biomedical implantable devices

Xie, Xianzong, Rieth, Loren, Tathireddy, Prashant, Solzbacher, Florian
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Year:
2013
Language:
english
DOI:
10.1109/transducers.2013.6626949
File:
PDF, 465 KB
english, 2013
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