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Optimized cleaning method for producing device quality InP(100) surfaces
Sun, Yun, Liu, Zhi, Machuca, Francisco, Pianetta, Piero, Spicer, William E.Volume:
97
Year:
2005
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1935745
File:
PDF, 347 KB
english, 2005