[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Damping characteristics of a micromachined piezoelectric diaphragm-based pressure sensor for underwater applications
Tan, C.W., Kottapalli, A.G.P., Wang, Z.H., Ji, X., Miao, J.M., Barbastathis, G., Triantafyllou, M.Year:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969138
File:
PDF, 645 KB
english, 2011