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[IEEE TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - Denver, CO, USA (2009.06.21-2009.06.25)] TRANSDUCERS 2009 - 2009 International Solid-State Sensors, Actuators and Microsystems Conference - A photovoltaic PN-junction vertical comb-drive micro-actuator
Huang, Hsin-Yu, Hsu, Hsiu-Ting, Lin, Hung-Yi, Chiu, Yi, Chiou, Jin-Chern, Fang, WeileunYear:
2009
Language:
english
DOI:
10.1109/sensor.2009.5286090
File:
PDF, 970 KB
english, 2009