Manufacturing of prestressed piezoelectric unimorphs using...

IEEE Transactions on Ultrasonics Ferroelectrics and Frequency Control 2006 / 05 Vol. 53; Iss. 5

Manufacturing of prestressed piezoelectric unimorphs using a postfired biasing layer

Juuti, J.A., Jantunen, H., Moilanen, V.-P., Leppavuori, S.
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Volume:
53
Language:
english
Journal:
IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control
DOI:
10.1109/tuffc.2006.1632674
Date:
May, 2006
File:
PDF, 649 KB
english, 2006
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