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Comparative band alignment of plasma-enhanced atomic layer deposited high-k dielectrics on gallium nitride
Yang, Jialing, Eller, Brianna S., Zhu, Chiyu, England, Chris, Nemanich, Robert J.Volume:
112
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4749268
File:
PDF, 3.06 MB
english, 2012