Self-consistent particle simulation of radio-frequency CF[sub 4] discharge with implementation of all ion–neutral reactive collisions
Denpoh, KazukiVolume:
16
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.581259
Date:
May, 1998
File:
PDF, 359 KB
english, 1998