Effect of deposition conditions of poly Si[sub 1−x]Ge[sub...

Effect of deposition conditions of poly Si[sub 1−x]Ge[sub x] films and Ge atoms on the electrical properties of poly Si[sub 1−x]Ge[sub x] (x=0,0.6)/HfO[sub 2] gate stack

Kang, Sung Kwan, Nam, Suheun, Min, Byoung Gi, Nam, Seok Woo, Ko, Dae-Hong, Cho, Mann-Ho
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Volume:
94
Year:
2003
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1605257
File:
PDF, 457 KB
english, 2003
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