Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 3
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Reflection high energy electron diffraction investigation and comparison of the initial stage during molecular beam epitaxy of AlN on Si(111) and Si(110) substrates
Mansurov, Vladimir, Xu, Xiaoyan, Pandikunta, Mahesh, Uddin, Rakib, Nikishin, SergeyVolume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3570922
File:
PDF, 431 KB
english, 2011