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Correction To "M-test: A Test Chip For Mems Material Property Measurement Using Electrostatically Actuated Test Structures"
Osterberg, P.M., Senturia, S.D.Volume:
6
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.1997.623119
Date:
September, 1997
File:
PDF, 6 KB
english, 1997