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[IEEE 2007 International Conference on Mechatronics and Automation - Harbin, China (2007.08.5-2007.08.8)] 2007 International Conference on Mechatronics and Automation - Time-Optimal Control of an Electrostatic Suspension for 4-inch Silicon Wafer
Ngo, Hung Manh, Baik, Bong Woo, Jeon, Jong UpYear:
2007
Language:
english
DOI:
10.1109/icma.2007.4303956
File:
PDF, 439 KB
english, 2007