A critical comparison between XRD and FIB residual stress...

Thin Solid Films 2014 / 12 Vol. 572

A critical comparison between XRD and FIB residual stress measurement techniques in thin films

Bemporad, E., Brisotto, M., Depero, L.E., Gelfi, M., Korsunsky, A.M., Lunt, A.J.G., Sebastiani, M.
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Volume:
572
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.09.053
Date:
December, 2014
File:
PDF, 1.01 MB
english, 2014
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