Structure and electronic properties of AlCrOxN1−x thin films deposited by reactive magnetron sputtering
Najafi, H., Karimi, A., Oveisi, E., Morstein, M.Volume:
572
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.07.066
Date:
December, 2014
File:
PDF, 1.84 MB
english, 2014