Ionized sputtering with a pulsed hollow cathode magnetron

Thin Solid Films 2014 / 12 Vol. 572

Ionized sputtering with a pulsed hollow cathode magnetron

Fietzke, Fred, Krätzschmar, Bernd-Georg
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Volume:
572
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2014.07.060
Date:
December, 2014
File:
PDF, 1.18 MB
english, 2014
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