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[IEEE 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Hyogo, Japan (2007.1.21-2007.1.25)] 2007 IEEE 20th International Conference on Micro Electro Mechanical Systems (MEMS) - Deep wet etching-through 1mm pyrex glass wafer for microfluidic applications
Ciprian Iliescu,, Bangtao Chen,, Jianmin Miao,Year:
2007
Language:
english
DOI:
10.1109/memsys.2007.4433150
File:
PDF, 5.19 MB
english, 2007