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Experimental study of spatial nonuniformities in 100 MHz capacitively coupled plasma using optical probe
Volynets, V. N., Ushakov, A. G., Sung, D., Tolmachev, Y. N., Pashkovsky, V. G., Lee, J. B., Kwon, T. Y., Jeong, K. S.Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2899413
File:
PDF, 869 KB
english, 2008