Experimental study of spatial nonuniformities in 100 MHz...

Experimental study of spatial nonuniformities in 100 MHz capacitively coupled plasma using optical probe

Volynets, V. N., Ushakov, A. G., Sung, D., Tolmachev, Y. N., Pashkovsky, V. G., Lee, J. B., Kwon, T. Y., Jeong, K. S.

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Volume:

Year:

2008

Language:

english

Journal:

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films

DOI:

10.1116/1.2899413

File:

PDF, 869 KB

english, 2008

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