Cluster-beam deposition for high-quality thin films

Physical Review A 1989 / 11 Vol. 40; Iss. 10

Cluster-beam deposition for high-quality thin films

Fuchs, G., Treilleux, M., Santos Aires, F., Cabaud, B., Melinon, P., Hoareau, A.
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Volume:
40
Language:
english
Journal:
Physical Review A
DOI:
10.1103/PhysRevA.40.6128
Date:
November, 1989
File:
PDF, 221 KB
english, 1989
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